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Quantum Design, Inc. - Products - SCL-Sensor.Tech – Self-Sensing Cantilevers
Quantum Design, Inc.

SCL-Sensor.Tech – Self-Sensing Cantilevers

Quantum Design, Inc. - Products - SCL-Sensor.Tech – Self-Sensing Cantilevers

SCL-Sensor.Tech develops and manufactures silicon piezo-resistive self-sensing cantilevers. This type of all-electrical cantilever allows completely new applications in the fields of AFM, nanoprobing, force measurement and other sensing applications.

Self-sensing cantilevers are equipped with a full piezo-resistive Wheatstone bridge that directly measures the cantilever signal electrically, removing the space-consuming requirement for an optical readout. Two variable resistors are on the cantilever and two on the chip. The cantilever chip is bonded onto a small PCB with a small connector for a quick and highly reproducible cantilever exchange. The sensor signal is read out and amplified by a small pre-amplifier PCB. This enables an easy and seamless integration with various instruments (e.g., SEM, TEM and many other measurement systems). The self-sensing cantilevers are available with a variety of resonance frequencies and spring constants.

 

  • Si-Tip
  • Tipless
  • SCD Tip

Self-Sensing Cantilevers with Silicon Tip

SCL-Sensor.Tech – Self-Sensing Cantilevers with Silicon Tip

This is considered the standard type of self-sensing cantilever. It exhibits a sharp tip made of silicon with a tip radius of <15 nm. Normally, the cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its lower side. On request you can order only the Si chip without PCB and connector for bonding on your own PCB holder.

This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).

PRSA-L300-F50/80-Si-PCB/CHP Probe Specifications

(Available in two specification ranges with a medium frequency of 50 kHz or 80 kHz depending on cantilever thickness.)

SCL-Sensor.Tech – Self-Sensing Cantilevers PRSA-L300
Common (for both types)  
Silicon tip radius (rtip) < 15 nm
Cantilever length, width (l/w) l = 305 µm, w = 110 µm
Sensitivity (s) 1-2 µV/nm
Applications AFM, nanoprobing,
force measurement in-situ SEM
or TEM, etc.
PRSA-L300-F50-Si-PCB  
Resonant frequency (fR) 30...65 kHz
Stiffness (k) 1...15 N/m
PRSA-L300-F80-Si-PCB  
Resonant frequency (fR) 65...95 kHz
Stiffness (k) 15...56 N/m

 

PRSA-L100-F400-Si-PCB Probe Specifications

SCL-Sensor.Tech – Self-Sensing Cantilevers PRSA-L100
Silicon tip radius (rtip) < 15 nm
Cantilever length, width (l/w) l = 110 µm, w = 48 µm
Sensitivity (s) 2 µV/nm
Applications AFM, nanoprobing,
force measurement in-situ SEM
or TEM, etc.
Resonant frequency (fR) 250...550 kHz
Stiffness (k) 14...170 N/m

PRS-L70-F900-Si-PCB/CHP Probe Specifications

SCL-Sensor.Tech – Self-Sensing Cantilevers PRSA-L70
Silicon tip radius (rtip) < 15 nm
Cantilever length, width (l/w) l = 70...85 µm, w = 30 µm
Sensitivity (s) 3 µV/nm
Applications Tapping mode AFM,
nanoprobing, force measurement in-situ SEM
or TEM, etc.
Resonant frequency (fR) 500...1300 kHz
Stiffness (k) 35...400 N/m

See the Si-Tip Product Page at SCL-Sensor.Tech for Datasheets

Self-Sensing Tipless Cantilevers

SCL-Sensor.Tech – Self-Sensing Tipless Cantilevers

These are self-sensing cantilevers without a tip (tipless, TL). This cantilever type is especially suitable for torque magnetometry, force sensing, gas property measurements, and many more applications. The free place where normally the AFM tip is located can be used to accept your own tip, glue a sample, or other uses. Normally, the cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its lower side. On request you can order only the Si chip without PCB and connector for bonding on your own PCB holder.

This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).

PRSA-L300-F50/80-TL-PCB/CHP Probe Specifications

(Available in two specification ranges with a medium frequency of 50 kHz or 80 kHz depending on cantilever thickness.)

SCL-Sensor.Tech – Self-Sensing Cantilevers PRSA-L300-TL
Common (for both types)  
Cantilever length, width (l/w) l = 300 µm, w = 110 µm
Sensitivity (s) 1...2 µV/nm
Applications Torque magnetometry,
force sensing, gas properties,
mounting of special tips.
PRSA-L300-F50-Si-PCB  
Resonant frequency (fR) 30...65 kHz
Stiffness (k) 1...15 N/m
PRSA-L300-F80-Si-PCB  
Resonant frequency (fR) 65...95 kHz
Stiffness (k) 15...56 N/m

 

PRSA-L100-F400-TL-PCB/CHP Probe Specifications

SCL-Sensor.Tech – Self-Sensing Cantilevers PRSA-L100-TL
Cantilever length, width (l/w) l = 110 µm, w = 48 µm
Sensitivity (s) 1...3 µV/nm
Applications Torque magnetometry,
force sensing, gas properties,
mounting of special tips.
Resonant frequency (fR) 250...550 kHz
Stiffness (k) 14...170 N/m

PRSA-L450-F30-TL-PCB/CHP Probe Specifications

SCL-Sensor.Tech – Self-Sensing Cantilevers PRSA-L450-TL
Cantilever length, width (l/w) l = 450 µm, w = 100 µm
Sensitivity (s) 1...2 µV/nm
Applications Torque magnetometry,
force sensing, gas properties,
mounting of special tips.
Resonant frequency (fR) 14...48 kHz
Stiffness (k) 0.5...24 N/m

See the Tipless Product Page at SCL-Sensor.Tech for Datasheets

Self-Sensing Cantilevers with Single Crystal Diamond Tip

SCL-Sensor.Tech – Self-Sensing Cantilevers with Single Crystal Diamond Tip

These are self-sensing cantilevers with a hard, sharp, long-life single crystal diamond tip (SCD). The cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its bottom side.

This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).

 

PRSA 300×100µm SCD Probe Specifications

(Available in two specification ranges with a medium frequency of 50 kHz or 80 kHz depending on cantilever thickness.)

SCL-Sensor.Tech – Self-Sensing Cantilevers SCD-L300
Silicon tip radius (rtip) < 15 nm
Cantilever length, width (l/w) l = 300 µm, w = 110 µm
Sensitivity (s) 1-2 µV/nm
Applications AFM, nanoindentation, scratching,
imaging of high aspect ratio sample features,
force measurement in-situ SEM or TEM
Resonant frequency (fR) 30...65 kHz
Stiffness (k) 1...15 N/m

 

PRSA 100×48µm SCD Probe Specifications

SCL-Sensor.Tech – Self-Sensing Cantilevers SCD-L100
Silicon tip radius (rtip) < 15 nm
Cantilever length, width (l/w) l = 110 µm, w = 48 µm
Sensitivity (s) 2 µV/nm
Applications AFM, nanoindentation, scratching,
imaging of high aspect ratio sample features,
force measurement in-situ SEM or TEM
Resonant frequency (fR) 250...550 kHz
Stiffness (k) 14...170 N/m

PRS 450×100µm SCD Probe Specifications

SCL-Sensor.Tech – Self-Sensing Cantilevers SCD-L450
Silicon tip radius (rtip) < 15 nm
Cantilever length, width (l/w) l = 450 µm, w = 100 µm
Sensitivity (s) 1...2 µV/nm
Applications AFM, nanoindentation, scratching,
imaging of high aspect ratio sample features,
force measurement in-situ SEM or TEM
Resonant frequency (fR) 14...48 kHz
Stiffness (k) 0.5...24 N/m

See the SCD Tip Product Page at SCL-Sensor.Tech for Datasheets